2021-187 Post-Process Testing Station for Semiconductor Device Fabrication

Summary:

UCLA researchers in the Department of Electrical and Computer Engineering have developed a system that can perform electrical and optical tests on semiconductor devices in a non-destructive fashion.

Background:

Modern electronic devices require the usage of semiconductors which need to be produced in a uniform way and evaluated to ensure functionality. Current ways to check functionality is through device testing. This can be done by performing electrical tests after key semiconductor processing steps allowing for removal or rework of damaged devices. However, this process is very slow and can only be completed on a select number of devices. Moreover, testing can be challenging for smaller devices due to their size. Therefore, there is a need for a rapid and non-destructive testing system that can be used on fabricated semiconductions.

Innovation:

UCLA researchers in the Department of Electrical and Computer Engineering have developed an apparatus that implements both electrical and optical tests to test of semiconductor devices. The system allows for the fast scanning of devices and determines whether a device is functional. The system’s fast testing of device in a non-destructive allows for the rework of non-functional semiconductor processing. This can reduce the number of non-functional semiconductor devices and remove faulty productions.

Potential Applications:

• Semiconductor testing
• Electronics testing
• Nanodevice testing

Advantages:

• Non-destructive
• Uses both electrical and optical tests
• Rapid testing

Development to Date: First description of the complete invention at conference

Related Papers: N/A

Patent Information:
For More Information:
Nikolaus Traitler
Business Development Officer (BDO)
nick.traitler@tdg.ucla.edu
Inventors:
Subramanian Iyer
Subramanian Iyer