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2013-467 Inspecting Method and Inspecting Apparatus

SUMMARY: UCLA researchers in the Department of Electrical and Computer Engineering have developed a method that utilizes a hybrid dispersion laser scanner for fast quality control of particles on silicon wafers to reduce wafer manufacturing cost. BACKGROUND: Web inspection, also known as surface inspection, is a method widely used for evaluation...

Published: 2/28/2024 | Inventor(s): Bahram Jalali, Keisuke Goda, Masahiro Watanabe, Toshiyuki Nakao, Yasuhiro Yoshitake

Keywords(s): Dispersion (Optics), Laser, Lens (Optics), Liquid-Crystal Display, Manufacturing, Optics, Quality Control, Sensors, Silicon, Surface Conductivity

Category(s): Electrical > Sensors, Electrical, Electrical > Displays, Electrical > Instrumentation, Optics & Photonics