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Summary UCLA researchers in the Department of Materials Science and Engineering have developed a nanofabrication method for improving the thermal properties of polycrystalline diamond films grown by chemical vapor deposition. Background Synthetic polycrystalline diamond grown by chemical vapor deposition (CVD) is used to thermally manage high power...

Published: 7/19/2023 | Inventor(s): Mark Goorsky, Yekan Wang, Tingyu Bai

Keywords(s): Electronics & Semiconductors

Category(s): Electrical > Electronics & Semiconductors, Materials > Fabrication Technologies

Selective Deposition Of Diamond In Thermal Vias

SummaryUCLA researchers in the Department of Materials Science & Engineering have developed a new method of diamond deposition in integrated circuit vias for thermal dissipation.BackgroundModern integrated circuits (IC) are typically fabricated by growing layers of semiconductors on a substrate. This growing method, epitaxial fabrication, has enabled...

Published: 7/19/2023 | Inventor(s): Mark Goorsky, Jeff Mckay, Karl Hobart, Tatyana Feygelson, Eugene Imhoff, Travis Anderson, Joshua Caldwell, Andrew Koehler, Bradford Pate, Marko Tadjer, Randijer Sandhu, Vincent Gambin, Gregory Lewis, Ioulia Smorchkova

Keywords(s): Electronics & Semiconductors

Category(s): Electrical > Electronics & Semiconductors, Materials > Semiconducting Materials