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2018-446 MULTIPLE-PATTERNING NANOSPHERE LITHOGRAPHY

Multiple-Patterning Nanosphere LithographySUMMARYResearchers led by Paul Weiss from the Department of Chemistry and Biochemistry at UCLA have developed a novel technique that solves the scalability issue in the fabrication of three-dimensional nanostructures.BACKGROUNDConfigurable three-dimensional nanostructures have a wide range of applications spanning...

Published: 7/19/2023 | Inventor(s): Xiaobin Xu, Qing Yang, Natcha Wattanatorn, Chuanzhen Zhao, Logan Stewart, Steven Jonas, Paul Weiss

Keywords(s): Photonics

Category(s): Optics & Photonics